{"id":1944,"date":"2025-05-21T11:12:58","date_gmt":"2025-05-21T03:12:58","guid":{"rendered":"http:\/\/deeptradeblog.com\/vet-energy\/epi-susceptor-failure-modes-how-to-avoid-contamination-in-gan-semiconductor-production\/"},"modified":"2025-05-21T11:12:58","modified_gmt":"2025-05-21T03:12:58","slug":"epi-susceptor-failure-modes-how-to-avoid-contamination-in-gan-semiconductor-production","status":"publish","type":"post","link":"https:\/\/www.deeptradeblog.com\/ja\/%e7%8d%a3%e5%8c%bb%e3%82%a8%e3%83%8d%e3%83%ab%e3%82%ae%e3%83%bc\/epi-susceptor-failure-modes-how-to-avoid-contamination-in-gan-semiconductor-production\/","title":{"rendered":"EPI\u5bb9\u8a8d\u969c\u5bb3\u30e2\u30fc\u30c9\uff1aGAN\u534a\u5c0e\u4f53\u751f\u7523\u306b\u304a\u3051\u308b\u6c5a\u67d3\u3092\u56de\u907f\u3059\u308b\u65b9\u6cd5"},"content":{"rendered":"<p><img decoding=\"async\" src=\"https:\/\/statics.mylandingpages.co\/static\/aaanxdmf26c522mpaaaaz2wwe7ppkact\/image\/e3e00ad3c3264c7c9c3904fcdc75e21c.webp\" alt=\"EPI\u5bb9\u8a8d\u969c\u5bb3\u30e2\u30fc\u30c9\uff1aGAN\u534a\u5c0e\u4f53\u751f\u7523\u306b\u304a\u3051\u308b\u6c5a\u67d3\u3092\u56de\u907f\u3059\u308b\u65b9\u6cd5\" title=\"EPI Susceptor Failure Modes: How to Avoid Contamination in GaN Semiconductor Production\u63d2\u56fe\" \/><\/p>\n<p>EPI\u53d7\u5bb9\u5668\u306f\u3001\u30a8\u30d4\u30bf\u30ad\u30b7\u30e3\u30eb\u306e\u6210\u9577\u4e2d\u306b\u30a6\u30a7\u30fc\u30cf\u3092\u30b5\u30dd\u30fc\u30c8\u3059\u308b\u3053\u3068\u306b\u3088\u308a\u3001GAN\u534a\u5c0e\u4f53\u751f\u7523\u306b\u304a\u3044\u3066\u91cd\u8981\u306a\u5f79\u5272\u3092\u679c\u305f\u3057\u307e\u3059\u3002\u3053\u308c\u3089\u306e\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8\u306e\u969c\u5bb3\u306f\u3001\u6c5a\u67d3\u306b\u3064\u306a\u304c\u308b\u53ef\u80fd\u6027\u304c\u3042\u308a\u3001\u305d\u308c\u304c\u88fd\u54c1\u306e\u54c1\u8cea\u3092\u640d\u306a\u3046\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059\u3002\u71b1\u5206\u89e3\u3084\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306e\u5265\u96e2\u306a\u3069\u306e\u554f\u984c\u306f\u3001\u751f\u7523\u74b0\u5883\u306b\u4e0d\u7d14\u7269\u3092\u653e\u51fa\u3057\u307e\u3059\u3002\u7a4d\u6975\u7684\u306a\u30e1\u30f3\u30c6\u30ca\u30f3\u30b9\u3068\u76e3\u8996\u306e\u5b9f\u8df5\u3092\u63a1\u7528\u3059\u308b\u3053\u3068\u306b\u3088\u308a\u3001\u3053\u308c\u3089\u306e\u30ea\u30b9\u30af\u3092\u6e1b\u3089\u3059\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002<\/p>\n<h2>\u30ad\u30fc\u30c6\u30a4\u30af\u30a2\u30a6\u30c8<\/h2>\n<ul>\n<li>EPI\u53d7\u5bb9\u5668\u3092\u78ba\u8a8d\u3057\u3066\u4fee\u6b63\u3059\u308b\u3068\u3001\u591a\u304f\u306e\u5834\u5408\u3001\u640d\u50b7\u304c\u65e9\u3081\u306b\u6b62\u307e\u308a\u3001\u6c5a\u67d3\u304c\u56de\u907f\u3055\u308c\u307e\u3059\u3002<\/li>\n<li>Using <a href=\"https:\/\/www.cnvetenergy.com\/graphite-susceptors-uniform-heating-epitaxial-growth\/\">\u5f37\u304f\u3001\u9306\u3073\u306a\u3044\u7d20\u6750<\/a> \u53d7\u5bb9\u8005\u306e\u5834\u5408\u3001\u5316\u5b66\u7684\u53cd\u5fdc\u304c\u60aa\u304f\u306a\u308b\u53ef\u80fd\u6027\u304c\u4f4e\u304f\u306a\u308a\u307e\u3059\u3002<\/li>\n<li><a href=\"https:\/\/www.cnvetenergy.com\/understanding-the-role-of-pecvd-graphite-boats\/\">EPI\u53d7\u5bb9\u5668\u306e\u4ea4\u63db<\/a> \u6642\u9593\u901a\u308a\u306b\u751f\u7523\u3092\u5b89\u5b9a\u3055\u305b\u3001GAN\u534a\u5c0e\u4f53\u306e\u6b20\u9665\u3092\u8efd\u6e1b\u3057\u307e\u3059\u3002<\/li>\n<\/ul>\n<h2>\u4e3b\u8981\u306aEPI\u53d7\u5bb9\u5668\u969c\u5bb3\u30e2\u30fc\u30c9<\/h2>\n<p><img decoding=\"async\" src=\"https:\/\/statics.mylandingpages.co\/static\/aaanxdmf26c522mpaaaaz2wwe7ppkact\/image\/cc8460ae9701404185670aff53f5b3a9.webp\" alt=\"\u4e3b\u8981\u306aEPI\u53d7\u5bb9\u5668\u969c\u5bb3\u30e2\u30fc\u30c9\" title=\"EPI Susceptor Failure Modes: How to Avoid Contamination in GaN Semiconductor Production\u63d2\u56fe1\" \/><\/p>\n<h3>\u71b1\u5206\u89e3<\/h3>\n<p>\u71b1\u5206\u89e3\u306f\u3001 <a href=\"https:\/\/www.cnvetenergy.com\/\">epi scomptector<\/a> \u6642\u9593\u306e\u7d4c\u904e\u3068\u3068\u3082\u306b\u6975\u7aef\u306a\u6e29\u5ea6\u306b\u3055\u3089\u3055\u308c\u3066\u3044\u307e\u3059\u3002\u3053\u306e\u969c\u5bb3\u30e2\u30fc\u30c9\u306f\u6750\u6599\u3092\u5f31\u3081\u3001\u305d\u306e\u69cb\u9020\u7684\u5b8c\u5168\u6027\u3092\u5931\u3044\u307e\u3059\u3002\u611f\u53d7\u6027\u306e\u8868\u9762\u304c\u5272\u308c\u305f\u308a\u3086\u304c\u3081\u305f\u308a\u3059\u308b\u9ad8\u6e29\u30d7\u30ed\u30bb\u30b9\u3067\u3053\u306e\u554f\u984c\u306b\u6c17\u4ed8\u304f\u304b\u3082\u3057\u308c\u307e\u305b\u3093\u3002\u3053\u308c\u3089\u306e\u5909\u5316\u306f\u3001\u4e0d\u5747\u4e00\u306a\u71b1\u5206\u5e03\u306b\u3064\u306a\u304c\u308b\u53ef\u80fd\u6027\u304c\u3042\u308a\u3001\u3053\u308c\u306f\u30a6\u30a7\u30fc\u30cf\u306e\u54c1\u8cea\u306b\u76f4\u63a5\u5f71\u97ff\u3057\u307e\u3059\u3002<\/p>\n<blockquote>\n<p><strong>\u30d2\u30f3\u30c8:<\/strong> \u71b1\u5206\u89e3\u3092\u6700\u5c0f\u9650\u306b\u6291\u3048\u308b\u305f\u3081\u306b\u3001\u30d7\u30ed\u30bb\u30b9\u6e29\u5ea6\u304c\u53d7\u5bb9\u4f53\u306e\u63a8\u5968\u7bc4\u56f2\u5185\u306b\u3068\u3069\u307e\u308b\u3053\u3068\u3092\u78ba\u8a8d\u3057\u3066\u304f\u3060\u3055\u3044\u3002<\/p>\n<\/blockquote>\n<h3>\u6a5f\u68b0\u7684\u306a\u6469\u8017\u3068\u640d\u50b7<\/h3>\n<p>\u591a\u304f\u306e\u5834\u5408\u3001\u6a5f\u68b0\u7684\u306a\u6469\u8017\u3068\u640d\u50b7\u306f\u3001\u7e70\u308a\u8fd4\u3057\u51e6\u7406\u307e\u305f\u306f\u30a8\u30d4\u30bb\u30d7\u30bf\u30fc\u3078\u306e\u30a6\u30a7\u30fc\u30cf\u306e\u4e0d\u9069\u5207\u306a\u8ca0\u8377\u304b\u3089\u751f\u3058\u308b\u3053\u3068\u304c\u3042\u308a\u307e\u3059\u3002\u30b9\u30af\u30e9\u30c3\u30c1\u3001\u3078\u3053\u307f\u3001\u307e\u305f\u306f\u305d\u306e\u4ed6\u306e\u7269\u7406\u7684\u6b20\u9665\u306f\u3001\u53d7\u5bb9\u8005\u306e\u8868\u9762\u306b\u767a\u751f\u3059\u308b\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059\u3002\u3053\u308c\u3089\u306e\u6b20\u9665\u306f\u3001\u30db\u30c3\u30c8\u30b9\u30dd\u30c3\u30c8\u307e\u305f\u306f\u4e0d\u5747\u4e00\u306a\u8868\u9762\u3092\u4f5c\u6210\u3057\u3001\u30a8\u30d4\u30bf\u30ad\u30b7\u30e3\u30eb\u5c64\u306e\u5747\u4e00\u6027\u3092\u640d\u306a\u3046\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059\u3002<\/p>\n<p>\u81ea\u52d5\u5316\u3055\u308c\u305f\u30a6\u30a7\u30fc\u30cf\u51e6\u7406\u30b7\u30b9\u30c6\u30e0\u3092\u4f7f\u7528\u3057\u3066\u3001\u53d7\u5bb9\u4f53\u306b\u5b9a\u671f\u7684\u306b\u640d\u50b7\u306e\u5146\u5019\u3092\u691c\u67fb\u3059\u308b\u3053\u3068\u306b\u3088\u308a\u3001\u6a5f\u68b0\u5f0f\u306e\u6469\u8017\u3092\u6e1b\u3089\u3059\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002<\/p>\n<h3>\u5316\u5b66\u8150\u98df<\/h3>\n<p>\u5316\u5b66\u8150\u98df\u306f\u3001\u30a8\u30d4\u30bf\u30ad\u30b7\u30e3\u30eb\u6210\u9577\u30d7\u30ed\u30bb\u30b9\u4e2d\u306b\u4f7f\u7528\u3055\u308c\u308b\u30ac\u30b9\u307e\u305f\u306f\u5316\u5b66\u7269\u8cea\u3068EPI\u53d7\u5bb9\u5668\u304c\u53cd\u5fdc\u3059\u308b\u3068\u767a\u751f\u3057\u307e\u3059\u3002\u6642\u9593\u304c\u7d4c\u3064\u306b\u3064\u308c\u3066\u3001\u3053\u306e\u53cd\u5fdc\u306f\u53d7\u5bb9\u8005\u306e\u8868\u9762\u3092\u5206\u89e3\u3057\u3001\u751f\u7523\u74b0\u5883\u306b\u4e0d\u7d14\u7269\u3092\u5c0e\u5165\u3059\u308b\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059\u3002\u8150\u98df\u306f\u3001\u653b\u6483\u7684\u306a\u5316\u5b66\u7269\u8cea\u307e\u305f\u306f\u9ad8\u6e7f\u5ea6\u30ec\u30d9\u30eb\u3092\u542b\u3080\u30d7\u30ed\u30bb\u30b9\u3067\u7279\u306b\u4e00\u822c\u7684\u3067\u3059\u3002<\/p>\n<p>\u3053\u308c\u3068\u6226\u3046\u306b\u306f\u3001\u304b\u3089\u4f5c\u6210\u3055\u308c\u305f\u5bb9\u7591\u8005\u3092\u9078\u629e\u3059\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059 <a href=\"https:\/\/www.cnvetenergy.com\/products\/\">corrosion-resistant materials<\/a>\u3002\u3055\u3089\u306b\u3001\u5236\u5fa1\u3055\u308c\u305f\u30d7\u30ed\u30bb\u30b9\u74b0\u5883\u3092\u7dad\u6301\u3059\u308b\u3053\u3068\u306f\u3001\u5316\u5b66\u53cd\u5fdc\u306e\u30ea\u30b9\u30af\u3092\u6e1b\u3089\u3059\u306e\u306b\u5f79\u7acb\u3061\u307e\u3059\u3002<\/p>\n<h3>\u5c64\u9593\u5265\u96e2<\/h3>\n<p>\u30a8\u30d4\u30bb\u30d7\u30b7\u30e7\u30f3\u306e\u4fdd\u8b77\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u304c\u5265\u304c\u308c\u305f\u308a\u5265\u304c\u308c\u59cb\u3081\u305f\u308a\u3059\u308b\u3068\u3001\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306e\u5265\u96e2\u304c\u767a\u751f\u3057\u307e\u3059\u3002\u3053\u306e\u969c\u5bb3\u30e2\u30fc\u30c9\u306f\u3001\u57fa\u790e\u3068\u306a\u308b\u6750\u6599\u3092\u751f\u7523\u30d7\u30ed\u30bb\u30b9\u306e\u53b3\u3057\u3044\u6761\u4ef6\u306b\u516c\u958b\u3057\u307e\u3059\u3002\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u304c\u60aa\u5316\u3059\u308b\u3068\u3001\u7c92\u5b50\u306f\u30a6\u30a7\u30fc\u30cf\u3092\u6c5a\u67d3\u3057\u3001\u6700\u7d42\u88fd\u54c1\u306e\u6b20\u9665\u306b\u3064\u306a\u304c\u308b\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059\u3002<\/p>\n<blockquote>\n<p><strong>Note:<\/strong> \u6469\u8017\u306e\u5146\u5019\u304c\u306a\u3044\u304b\u3001\u53d7\u5bb9\u5668\u306e\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306b\u5b9a\u671f\u7684\u306b\u691c\u67fb\u3057\u307e\u3059\u3002\u5265\u96e2\u304c\u91cd\u5ea6\u306b\u306a\u308b\u524d\u306b\u53d7\u5bb9\u5668\u3092\u4ea4\u63db\u3059\u308b\u3068\u3001\u8cbb\u7528\u306e\u304b\u304b\u308b\u6c5a\u67d3\u306e\u554f\u984c\u304b\u3089\u3042\u306a\u305f\u3092\u6551\u3046\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002<\/p>\n<\/blockquote>\n<h2>EPI\u53d7\u5bb9\u5668\u306e\u969c\u5bb3\u304b\u3089\u306e\u6c5a\u67d3\u30ea\u30b9\u30af<\/h2>\n<p><img decoding=\"async\" src=\"https:\/\/statics.mylandingpages.co\/static\/aaanxdmf26c522mpaaaaz2wwe7ppkact\/image\/bc53061ae112438195e4c730e51fe2f0.webp\" alt=\"EPI\u53d7\u5bb9\u5668\u306e\u969c\u5bb3\u304b\u3089\u306e\u6c5a\u67d3\u30ea\u30b9\u30af\" title=\"EPI Susceptor Failure Modes: How to Avoid Contamination in GaN Semiconductor Production\u63d2\u56fe2\" \/><\/p>\n<h3>\u7c92\u5b50\u751f\u6210<\/h3>\n<p>\u3044\u3064 <a href=\"https:\/\/www.cnvetenergy.com\/de\/epitaxial-susceptors-semiconductor-manufacturing\/\">epi scomptector<\/a> \u5931\u6557\u3057\u3001\u751f\u7523\u74b0\u5883\u3092\u6c5a\u67d3\u3059\u308b\u7c92\u5b50\u3092\u751f\u6210\u3059\u308b\u3053\u3068\u304c\u3088\u304f\u3042\u308a\u307e\u3059\u3002\u3053\u308c\u3089\u306e\u7c92\u5b50\u306f\u3001\u8868\u9762\u4e80\u88c2\u3001\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u5c64\u9593\u5265\u96e2\u3001\u307e\u305f\u306f\u6a5f\u68b0\u7684\u306a\u6469\u8017\u304b\u3089\u6765\u308b\u3053\u3068\u304c\u3042\u308a\u307e\u3059\u3002\u30ea\u30ea\u30fc\u30b9\u3055\u308c\u308b\u3068\u3001\u5f7c\u3089\u306f\u30a6\u30a7\u30fc\u30cf\u306b\u843d\u3061\u7740\u304d\u3001\u6700\u7d42\u88fd\u54c1\u306e\u54c1\u8cea\u3092\u4f4e\u4e0b\u3055\u305b\u308b\u6b20\u9665\u3092\u4f5c\u6210\u3057\u307e\u3059\u3002\u5fae\u8996\u7684\u306a\u7c92\u5b50\u3067\u3055\u3048\u3001\u30a8\u30d4\u30bf\u30ad\u30b7\u30e3\u30eb\u6210\u9577\u30d7\u30ed\u30bb\u30b9\u3092\u7834\u58ca\u3057\u3001\u8cbb\u7528\u306e\u304b\u304b\u308b\u518d\u52a0\u5de5\u307e\u305f\u306f\u30b9\u30af\u30e9\u30c3\u30d7\u306b\u3064\u306a\u304c\u308b\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059\u3002<\/p>\n<blockquote>\n<p><strong>\u30d2\u30f3\u30c8:<\/strong> \u30af\u30ea\u30fc\u30f3\u30eb\u30fc\u30e0\u30d7\u30ed\u30c8\u30b3\u30eb\u3068\u5b9a\u671f\u7684\u306a\u691c\u67fb\u3092\u4f7f\u7528\u3057\u3066\u3001\u7c92\u5b50\u751f\u6210\u3092\u65e9\u671f\u306b\u30ad\u30e3\u30c3\u30c1\u3057\u307e\u3059\u3002\u3053\u308c\u306b\u3088\u308a\u3001\u6c5a\u67d3\u306e\u306a\u3044\u74b0\u5883\u3092\u7dad\u6301\u3059\u308b\u306e\u306b\u5f79\u7acb\u3061\u307e\u3059\u3002<\/p>\n<\/blockquote>\n<h3>\u4e0d\u7d14\u7269\u306e\u7d39\u4ecb<\/h3>\n<p><a href=\"https:\/\/www.cnvetenergy.com\/sic-coating-corrosion-wafer-processing\/\">\u5316\u5b66\u8150\u98df<\/a> \u307e\u305f\u306f\u3001EPI\u5bb9\u7591\u8005\u306e\u7269\u8cea\u7684\u52a3\u5316\u306f\u3001\u30d7\u30ed\u30bb\u30b9\u306b\u4e0d\u7d14\u7269\u3092\u5c0e\u5165\u3059\u308b\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059\u3002\u3053\u308c\u3089\u306e\u4e0d\u7d14\u7269\u306f\u3001\u30a8\u30d4\u30bf\u30ad\u30b7\u30e3\u30eb\u306e\u6210\u9577\u4e2d\u306b\u4f7f\u7528\u3055\u308c\u308b\u30ac\u30b9\u307e\u305f\u306f\u5316\u5b66\u7269\u8cea\u3068\u6df7\u5408\u3057\u3001\u5c64\u306e\u7d44\u6210\u3092\u5909\u5316\u3055\u305b\u307e\u3059\u3002\u305d\u306e\u7d50\u679c\u3001GAN\u534a\u5c0e\u4f53\u306e\u96fb\u6c17\u7279\u6027\u306f\u4ed5\u69d8\u3092\u6e80\u305f\u3055\u306a\u3044\u5834\u5408\u304c\u3042\u308a\u307e\u3059\u3002\u4e0d\u7d14\u7269\u306f\u3001\u73fe\u5834\u3067\u306e\u30c7\u30d0\u30a4\u30b9\u306e\u6545\u969c\u306e\u30ea\u30b9\u30af\u3082\u9ad8\u3081\u307e\u3059\u3002<\/p>\n<p>\u3053\u308c\u3092\u9632\u3050\u306b\u306f\u3001\u9ad8\u7d14\u5ea6\u6750\u6599\u304b\u3089\u4f5c\u3089\u308c\u305f\u5bb9\u7591\u8005\u3092\u9078\u629e\u3057\u307e\u3059\u3002\u751f\u7523\u4e2d\u306b\u5316\u5b66\u74b0\u5883\u3092\u76e3\u8996\u3059\u308b\u3068\u3001\u6c5a\u67d3\u6e90\u306e\u691c\u51fa\u3068\u5bfe\u51e6\u306b\u3082\u5f79\u7acb\u3061\u307e\u3059\u3002<\/p>\n<h3>\u30a6\u30a7\u30fc\u30cf\u306e\u5747\u4e00\u6027\u306e\u554f\u984c<\/h3>\n<p>\u640d\u50b7\u307e\u305f\u306f\u52a3\u5316\u3057\u305fEPI\u53d7\u5bb9\u5668\u306f\u3001\u3057\u3070\u3057\u3070\u4e0d\u5747\u4e00\u306a\u71b1\u5206\u5e03\u307e\u305f\u306f\u8868\u9762\u306e\u4e0d\u898f\u5247\u6027\u3092\u5f15\u304d\u8d77\u3053\u3057\u307e\u3059\u3002\u3053\u308c\u306f\u3001\u30a6\u30a7\u30fc\u30cf\u306b\u4e0d\u5747\u4e00\u306a\u30a8\u30d4\u30bf\u30ad\u30b7\u30e3\u30eb\u5c64\u306b\u3064\u306a\u304c\u308a\u307e\u3059\u3002\u5747\u4e00\u6027\u304c\u4f4e\u3044\u3068\u3001\u30c7\u30d0\u30a4\u30b9\u306e\u30d1\u30d5\u30a9\u30fc\u30de\u30f3\u30b9\u304c\u5f71\u97ff\u3057\u3001\u53ce\u91cf\u304c\u6e1b\u5c11\u3057\u307e\u3059\u3002\u305f\u3068\u3048\u3070\u3001\u5c64\u306e\u539a\u3055\u306e\u5909\u52d5\u306f\u3001\u30a6\u30a7\u30fc\u30cf\u5168\u4f53\u306e\u96fb\u6c17\u7684\u77db\u76fe\u3092\u5f15\u304d\u8d77\u3053\u3059\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059\u3002<\/p>\n<p>\u6469\u8017\u3084\u640d\u50b7\u306e\u5146\u5019\u306b\u3064\u3044\u3066\u306f\u3001\u53d7\u5bb9\u5668\u306b\u5b9a\u671f\u7684\u306b\u691c\u67fb\u3057\u307e\u3059\u3002\u30a6\u30a7\u30fc\u30cf\u306b\u5f71\u97ff\u3092\u4e0e\u3048\u308b\u524d\u306b\u305d\u308c\u3092\u4ea4\u63db\u3059\u308b\u3068\u3001\u4e00\u8cab\u3057\u305f\u751f\u7523\u54c1\u8cea\u304c\u4fdd\u8a3c\u3055\u308c\u307e\u3059\u3002<\/p>\n<h2>\u6c5a\u67d3\u3092\u9632\u3050\u305f\u3081\u306e\u6226\u7565<\/h2>\n<h3>\u5b9a\u671f\u7684\u306a\u30e1\u30f3\u30c6\u30ca\u30f3\u30b9\u3068\u691c\u67fb<\/h3>\n<p><a href=\"https:\/\/www.cnvetenergy.com\/extend-lifespan-with-cvd-sic-coating\/\">\u5b9a\u671f\u7684\u306a\u30e1\u30f3\u30c6\u30ca\u30f3\u30b9<\/a> \u307e\u305f\u3001\u751f\u7523\u30d7\u30ed\u30bb\u30b9\u306e\u6c5a\u67d3\u3092\u9632\u3050\u305f\u3081\u306b\u691c\u67fb\u304c\u4e0d\u53ef\u6b20\u3067\u3059\u3002 EPI\u53d7\u5bb9\u5668\u306e\u72b6\u614b\u3092\u65e5\u5e38\u7684\u306b\u78ba\u8a8d\u3059\u308b\u3053\u3068\u306b\u3088\u308a\u3001\u6469\u8017\u3001\u8150\u98df\u3001\u307e\u305f\u306f\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306e\u5265\u96e2\u306e\u521d\u671f\u5146\u5019\u3092\u7279\u5b9a\u3067\u304d\u307e\u3059\u3002\u3053\u306e\u7a4d\u6975\u7684\u306a\u30a2\u30d7\u30ed\u30fc\u30c1\u306f\u3001\u30b3\u30b9\u30c8\u306e\u304b\u304b\u308b\u6c5a\u67d3\u306e\u554f\u984c\u306b\u30a8\u30b9\u30ab\u30ec\u30fc\u30c8\u3059\u308b\u524d\u306b\u3001\u6f5c\u5728\u7684\u306a\u554f\u984c\u306b\u5bfe\u51e6\u3059\u308b\u306e\u306b\u5f79\u7acb\u3061\u307e\u3059\u3002<\/p>\n<p>\u76ee\u8996\u691c\u67fb\u3001\u8868\u9762\u6d17\u6d44\u3001\u30d1\u30d5\u30a9\u30fc\u30de\u30f3\u30b9\u30c6\u30b9\u30c8\u3092\u542b\u3080\u30e1\u30f3\u30c6\u30ca\u30f3\u30b9\u30b9\u30b1\u30b8\u30e5\u30fc\u30eb\u3092\u4f5c\u6210\u3057\u307e\u3059\u3002\u9855\u5fae\u93e1\u3084\u8868\u9762\u30b9\u30ad\u30e3\u30ca\u30fc\u306a\u3069\u306e\u30c4\u30fc\u30eb\u3092\u4f7f\u7528\u3057\u3066\u3001\u8089\u773c\u3067\u306f\u898b\u3048\u306a\u3044\u53ef\u80fd\u6027\u306e\u3042\u308b\u9855\u5fae\u93e1\u7684\u6b20\u9665\u3092\u691c\u51fa\u3057\u307e\u3059\u3002<\/p>\n<blockquote>\n<p><strong>\u30d2\u30f3\u30c8:<\/strong> \u5404\u691c\u67fb\u304a\u3088\u3073\u30e1\u30f3\u30c6\u30ca\u30f3\u30b9\u6d3b\u52d5\u3092\u6587\u66f8\u5316\u3057\u307e\u3059\u3002\u8a73\u7d30\u306a\u30ec\u30b3\u30fc\u30c9\u3092\u4fdd\u6301\u3059\u308b\u3068\u3001\u30c8\u30ec\u30f3\u30c9\u3092\u8ffd\u8de1\u3057\u3001\u53d7\u5bb9\u5668\u304c\u3044\u3064\u4ea4\u63db\u3059\u308b\u5fc5\u8981\u304c\u3042\u308b\u304b\u3092\u4e88\u6e2c\u3059\u308b\u306e\u306b\u5f79\u7acb\u3061\u307e\u3059\u3002<\/p>\n<\/blockquote>\n<h3>\u6750\u6599\u3068\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306e\u6700\u9069\u5316<\/h3>\n<p>EPI\u53d7\u5bb9\u5668\u3067\u4f7f\u7528\u3055\u308c\u308b\u6750\u6599\u3068\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306f\u3001\u305d\u306e\u8010\u4e45\u6027\u3068\u30d1\u30d5\u30a9\u30fc\u30de\u30f3\u30b9\u306b\u304a\u3044\u3066\u91cd\u8981\u306a\u5f79\u5272\u3092\u679c\u305f\u3057\u307e\u3059\u3002\u9ad8\u54c1\u8cea\u306e\u8150\u98df\u8010\u6027\u6750\u6599\u3092\u9078\u629e\u3059\u308b\u3068\u3001\u6c5a\u67d3\u306b\u3064\u306a\u304c\u308b\u5316\u5b66\u53cd\u5fdc\u306e\u30ea\u30b9\u30af\u304c\u4f4e\u4e0b\u3057\u307e\u3059\u3002\u540c\u69d8\u306b\u3001\u9ad8\u5ea6\u306a\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306f\u3001\u71b1\u304a\u3088\u3073\u6a5f\u68b0\u7684\u640d\u50b7\u304b\u3089\u53d7\u5bb9\u5668\u3092\u4fdd\u8b77\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002<\/p>\n<p>\u30b5\u30d7\u30e9\u30a4\u30e4\u30fc\u3068\u5354\u529b\u3057\u3066\u3001\u7279\u5b9a\u306e\u751f\u7523\u74b0\u5883\u306b\u5408\u308f\u305b\u305f\u6750\u6599\u3068\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3092\u9078\u629e\u3057\u307e\u3059\u3002\u305f\u3068\u3048\u3070\u3001\u30d7\u30ed\u30bb\u30b9\u306b\u7a4d\u6975\u7684\u306a\u5316\u5b66\u7269\u8cea\u304c\u542b\u307e\u308c\u3066\u3044\u308b\u5834\u5408\u306f\u3001\u5316\u5b66\u7684\u306b\u4e0d\u6d3b\u6027\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3092\u5099\u3048\u305f\u5bb9\u7591\u8005\u3092\u9078\u629e\u3057\u3066\u304f\u3060\u3055\u3044\u3002<\/p>\n<table>\n<thead>\n<tr>\n<th><strong>Material Type<\/strong><\/th>\n<th><strong>Benefits<\/strong><\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u9ad8\u7d14\u5ea6\u306e\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8<\/td>\n<td>\u512a\u308c\u305f\u71b1\u5b89\u5b9a\u6027<\/td>\n<\/tr>\n<tr>\n<td><a href=\"https:\/\/www.cnvetenergy.com\/top-silicon-carbide-wafer-boat-brands-2025\/\">Silicon carbide coating<\/a><\/td>\n<td>\u5316\u5b66\u8150\u98df\u306b\u5bfe\u3059\u308b\u8010\u6027<\/td>\n<\/tr>\n<tr>\n<td>\u9ad8\u5ea6\u306a\u30bb\u30e9\u30df\u30c3\u30af\u5c64<\/td>\n<td>\u6a5f\u68b0\u7684\u8010\u4e45\u6027\u306e\u5411\u4e0a<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<blockquote>\n<p><strong>Note:<\/strong> \u9078\u629e\u3057\u305f\u6750\u6599\u3068\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306e\u6027\u80fd\u3092\u5b9a\u671f\u7684\u306b\u8a55\u4fa1\u3057\u307e\u3059\u3002\u65b0\u3057\u3044\u30c6\u30af\u30ce\u30ed\u30b8\u30fc\u3078\u306e\u30a2\u30c3\u30d7\u30b0\u30ec\u30fc\u30c9\u306f\u3001\u751f\u7523\u54c1\u8cea\u3092\u6539\u5584\u3057\u3001\u6c5a\u67d3\u30ea\u30b9\u30af\u3092\u6e1b\u3089\u3059\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002<\/p>\n<\/blockquote>\n<h3>\u30d7\u30ed\u30bb\u30b9\u306e\u76e3\u8996\u3068\u5236\u5fa1<\/h3>\n<p>\u751f\u7523\u30d7\u30ed\u30bb\u30b9\u306e\u76e3\u8996\u3068\u5236\u5fa1\u306b\u3088\u308a\u3001EPI\u53d7\u5bb9\u5668\u304c\u5b89\u5168\u306a\u30d1\u30e9\u30e1\u30fc\u30bf\u30fc\u5185\u3067\u52d5\u4f5c\u3059\u308b\u3053\u3068\u304c\u4fdd\u8a3c\u3055\u308c\u307e\u3059\u3002\u6e29\u5ea6\u306e\u5909\u52d5\u3001\u30ac\u30b9\u306e\u6d41\u308c\u306e\u77db\u76fe\u3001\u307e\u305f\u306f\u4e0d\u9069\u5207\u306a\u53d6\u308a\u6271\u3044\u306f\u3001\u53d7\u5bb9\u8005\u306e\u52a3\u5316\u3092\u52a0\u901f\u3057\u3001\u6c5a\u67d3\u30ea\u30b9\u30af\u3092\u5897\u52a0\u3055\u305b\u308b\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059\u3002<\/p>\n<p>\u30bb\u30f3\u30b5\u30fc\u3092\u30a4\u30f3\u30b9\u30c8\u30fc\u30eb\u3057\u3066\u3001\u6e29\u5ea6\u3001\u5727\u529b\u3001\u30ac\u30b9\u7d44\u6210\u306a\u3069\u306e\u4e3b\u8981\u306a\u5909\u6570\u3092\u30ea\u30a2\u30eb\u30bf\u30a4\u30e0\u3067\u8ffd\u8de1\u3057\u307e\u3059\u3002\u3053\u306e\u30c7\u30fc\u30bf\u3092\u4f7f\u7528\u3057\u3066\u3001\u30d7\u30ed\u30bb\u30b9\u8a2d\u5b9a\u3092\u8abf\u6574\u3057\u3001\u6700\u9069\u306a\u6761\u4ef6\u3092\u7dad\u6301\u3057\u307e\u3059\u3002\u81ea\u52d5\u76e3\u8996\u30b7\u30b9\u30c6\u30e0\u306f\u3001\u9038\u8131\u3092\u8b66\u544a\u3057\u3001\u3059\u3050\u306b\u662f\u6b63\u63aa\u7f6e\u3092\u8b1b\u3058\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002<\/p>\n<blockquote>\n<p><strong>Callout:<\/strong> \u4e00\u8cab\u3057\u305f\u30d7\u30ed\u30bb\u30b9\u5236\u5fa1\u306f\u3001\u53d7\u5bb9\u5668\u306e\u5bff\u547d\u3092\u5ef6\u3070\u3059\u3060\u3051\u3067\u306a\u304f\u3001\u30a6\u30a7\u30fc\u30cf\u306e\u54c1\u8cea\u3068\u53ce\u91cf\u3092\u6539\u5584\u3057\u307e\u3059\u3002<\/p>\n<\/blockquote>\n<h3>\u30bf\u30a4\u30e0\u30ea\u30fc\u306a\u5bb9\u7591\u8005\u306e\u4ea4\u63db<\/h3>\n<p>\u6700\u9ad8\u306e\u30e1\u30f3\u30c6\u30ca\u30f3\u30b9\u6163\u884c\u304c\u3042\u3063\u3066\u3082\u3001\u3059\u3079\u3066\u306eEPI\u53d7\u5bb9\u5668\u306b\u306f\u6709\u9650\u5bff\u547d\u304c\u3042\u308a\u307e\u3059\u3002\u4ea4\u63db\u3092\u9045\u3089\u305b\u308b\u3068\u3001\u7c92\u5b50\u751f\u6210\u3001\u4e0d\u7d14\u7269\u306e\u5c0e\u5165\u3001\u307e\u305f\u306f\u30a6\u30a7\u30fc\u30cf\u306e\u5747\u4e00\u6027\u306e\u554f\u984c\u306b\u3088\u308b\u6c5a\u67d3\u306e\u30ea\u30b9\u30af\u304c\u9ad8\u307e\u308a\u307e\u3059\u3002\u53d7\u5bb9\u5668\u3092\u9069\u5207\u306a\u30bf\u30a4\u30df\u30f3\u30b0\u3067\u4ea4\u63db\u3059\u308b\u3068\u3001\u9014\u5207\u308c\u306a\u3044\u751f\u7523\u54c1\u8cea\u304c\u4fdd\u8a3c\u3055\u308c\u307e\u3059\u3002<\/p>\n<p>\u53d7\u5bb9\u5668\u306e\u6750\u6599\u3001\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3001\u304a\u3088\u3073\u4f7f\u7528\u6761\u4ef6\u306b\u57fa\u3065\u3044\u3066\u3001\u4ea4\u63db\u30b9\u30b1\u30b8\u30e5\u30fc\u30eb\u3092\u78ba\u7acb\u3057\u307e\u3059\u3002\u305f\u3068\u3048\u3070\u3001\u9ad8\u6e29\u3084\u653b\u6483\u7684\u306a\u5316\u5b66\u7269\u8cea\u306b\u3055\u3089\u3055\u308c\u305f\u53d7\u5bb9\u8005\u306f\u3001\u3088\u308a\u983b\u7e41\u306b\u4ea4\u63db\u3059\u308b\u5fc5\u8981\u304c\u3042\u308b\u5834\u5408\u304c\u3042\u308a\u307e\u3059\u3002<\/p>\n<blockquote>\n<p><strong>Reminder:<\/strong> \u6545\u969c\u306e\u76ee\u306b\u898b\u3048\u308b\u5146\u5019\u3092\u5f85\u305f\u306a\u3044\u3067\u304f\u3060\u3055\u3044\u3002\u5bb9\u7591\u8005\u3092\u7a4d\u6975\u7684\u306b\u4ea4\u63db\u3059\u308b\u3068\u3001\u30c0\u30a6\u30f3\u30bf\u30a4\u30e0\u304c\u6700\u5c0f\u9650\u306b\u6291\u3048\u3089\u308c\u3001\u6700\u7d42\u88fd\u54c1\u306e\u30b3\u30b9\u30c8\u306e\u304b\u304b\u308b\u6b20\u9665\u304c\u9632\u6b62\u3055\u308c\u307e\u3059\u3002<\/p>\n<\/blockquote>\n<hr \/>\n<p>\u71b1\u5206\u89e3\u3001\u6a5f\u68b0\u7684\u6469\u8017\u3001\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306e\u5265\u96e2\u306a\u3069\u306eEPI\u53d7\u5bb9\u5668\u306e\u969c\u5bb3\u306f\u3001\u91cd\u5927\u306a\u6c5a\u67d3\u30ea\u30b9\u30af\u3092\u3082\u305f\u3089\u3057\u307e\u3059\u3002\u3053\u308c\u3089\u306b\u306f\u3001\u7c92\u5b50\u751f\u6210\u3001\u4e0d\u7d14\u7269\u306e\u5c0e\u5165\u3001\u304a\u3088\u3073\u30a6\u30a7\u30fc\u30cf\u306e\u5747\u4e00\u6027\u306e\u554f\u984c\u304c\u542b\u307e\u308c\u307e\u3059\u3002<\/p>\n<blockquote>\n<p><strong>Reminder:<\/strong> \u5b9a\u671f\u7684\u306a\u30e1\u30f3\u30c6\u30ca\u30f3\u30b9\u3001\u6750\u6599\u306e\u6700\u9069\u5316\u3001\u304a\u3088\u3073\u30bf\u30a4\u30e0\u30ea\u30fc\u306a\u4ea4\u63db\u306f\u3001\u6c5a\u67d3\u3092\u9632\u3050\u305f\u3081\u306b\u4e0d\u53ef\u6b20\u3067\u3059\u3002<\/p>\n<\/blockquote>\n<p>\u7a4d\u6975\u7684\u306a\u6226\u7565\u3092\u63a1\u7528\u3059\u308b\u3068\u3001\u4e00\u8cab\u3057\u305f\u751f\u7523\u54c1\u8cea\u304c\u4fdd\u8a3c\u3055\u308c\u3001GAN\u534a\u5c0e\u4f53\u306e\u4fe1\u983c\u6027\u304c\u5411\u4e0a\u3057\u307e\u3059\u3002<\/p>\n<h2>\u3088\u304f\u3042\u308b\u8cea\u554f<\/h2>\n<h3>EPI\u53d7\u5bb9\u5668\u306e\u5bff\u547d\u306f\u4f55\u3067\u3059\u304b\uff1f<\/h3>\n<p>\u5bff\u547d\u306f\u3001\u6750\u6599\u3001\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3001\u304a\u3088\u3073\u4f7f\u7528\u306b\u4f9d\u5b58\u3057\u307e\u3059\u3002\u901a\u5e38\u3001\u9069\u5207\u306a\u30e1\u30f3\u30c6\u30ca\u30f3\u30b9\u3068\u5236\u5fa1\u3055\u308c\u305f\u751f\u7523\u6761\u4ef6\u3067\u6570\u30f6\u6708\u304b\u3089\u6570\u5e74\u7d9a\u304d\u307e\u3059\u3002<\/p>\n<h3>\u53d7\u5bb9\u8005\u306e\u6545\u969c\u306e\u521d\u671f\u5146\u5019\u3092\u3069\u306e\u3088\u3046\u306b\u691c\u51fa\u3067\u304d\u307e\u3059\u304b\uff1f<\/h3>\n<p>\u8868\u9762\u4e80\u88c2\u3001\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u6469\u8017\u3001\u307e\u305f\u306f\u4e0d\u5747\u4e00\u306a\u71b1\u5206\u5e03\u3092\u691c\u67fb\u3057\u307e\u3059\u3002\u6b63\u78ba\u306a\u691c\u51fa\u306e\u305f\u3081\u306b\u9855\u5fae\u93e1\u3084\u30bb\u30f3\u30b5\u30fc\u306a\u3069\u306e\u30c4\u30fc\u30eb\u3092\u4f7f\u7528\u3057\u307e\u3059\u3002<\/p>\n<h3>\u81ea\u52d5\u5316\u306f\u6c5a\u67d3\u306e\u30ea\u30b9\u30af\u3092\u6e1b\u3089\u3059\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u304b\uff1f<\/h3>\n<p>\u306f\u3044\u3001\u81ea\u52d5\u5316\u3055\u308c\u305f\u30b7\u30b9\u30c6\u30e0\u306f\u3001\u30a6\u30a7\u30fc\u30cf\u306e\u53d6\u308a\u6271\u3044\u3068\u30d7\u30ed\u30bb\u30b9\u306e\u76e3\u8996\u3092\u6539\u5584\u3057\u307e\u3059\u3002\u4eba\u70ba\u7684\u30a8\u30e9\u30fc\u3092\u6700\u5c0f\u9650\u306b\u6291\u3048\u3001\u4e00\u8cab\u3057\u305f\u751f\u7523\u6761\u4ef6\u3092\u78ba\u4fdd\u3057\u307e\u3059\u3002<\/p>","protected":false},"excerpt":{"rendered":"<p>\u7a4d\u6975\u7684\u306a\u6226\u7565\u3092\u4f7f\u7528\u3057\u3066\u3001\u71b1\u5206\u89e3\u3001\u6469\u8017\u3001\u5265\u96e2\u306a\u3069\u306eEPI\u53d7\u5bb9\u5668\u969c\u5bb3\u30e2\u30fc\u30c9\u306b\u5bfe\u51e6\u3059\u308b\u3053\u3068\u306b\u3088\u308a\u3001GAN\u751f\u7523\u306e\u6c5a\u67d3\u3092\u9632\u304e\u307e\u3059\u3002<\/p>","protected":false},"author":15,"featured_media":0,"comment_status":"","ping_status":"","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[1],"tags":[],"class_list":["post-1944","post","type-post","status-publish","format-standard","hentry","category-uncategorized"],"_links":{"self":[{"href":"https:\/\/www.deeptradeblog.com\/ja\/wp-json\/wp\/v2\/posts\/1944","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.deeptradeblog.com\/ja\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.deeptradeblog.com\/ja\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.deeptradeblog.com\/ja\/wp-json\/wp\/v2\/users\/15"}],"replies":[{"embeddable":true,"href":"https:\/\/www.deeptradeblog.com\/ja\/wp-json\/wp\/v2\/comments?post=1944"}],"version-history":[{"count":0,"href":"https:\/\/www.deeptradeblog.com\/ja\/wp-json\/wp\/v2\/posts\/1944\/revisions"}],"wp:attachment":[{"href":"https:\/\/www.deeptradeblog.com\/ja\/wp-json\/wp\/v2\/media?parent=1944"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.deeptradeblog.com\/ja\/wp-json\/wp\/v2\/categories?post=1944"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.deeptradeblog.com\/ja\/wp-json\/wp\/v2\/tags?post=1944"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}